WAlN-SA003 AlGaN Epitaxial wafer

Product Model | WAlN-SA003 |
Product Category | AlGaN Epitaxial wafer |
thickness | [2, 3) μm |
(002) | ≤ 150 arcsec |
(102) | ≤ 500 arcsec |
Product description
Basic Parameters
parameter name | parameter value |
---|---|
Diameter | 2 inch |
Substrate | Sapphire |
Substrate Thickness | 430±20 μm |
Epilayer Thickness | [2, 3) μm |
FWHM of 002 XRC | ≤ 150 arcsec |
FWHM of 102 XRC | ≤ 500 arcsec |
Front side roughness | ≤ 1. 5 nm (10×10 μm) |
Edge exclusion | ≤ 3 mm |
Through Crack | None |
Surface orientation of a-plane | 0°±0. 1° |
Surface orientation of m-plane | 0. 2°±0. 1° |
Primary flat orientation | a-plane±0. 1° |
Primary flat length | 16±1 mm |
Back side roughness | 0. 8±0. 2 μm |
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Core components
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